Laser Lithography for Making Jewelry (1st Report)
نویسندگان
چکیده
منابع مشابه
Optimal lithium targets for laser-plasma lithography
Lithium containing droplet and cluster targets irradiated by laser pulses are proposed as prospective source of for soft x-ray lithography. Analytical model and simulations show that laser with repetition rate of several MHz with energy of several mJ and pulse duration 10 ps is required.
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1996
ISSN: 0912-0289,1882-675X
DOI: 10.2493/jjspe.62.1587